Srinivasa rao Gondi. Multi-Modal AI-Driven Electrical and Optical Characterization Framework for Sub-5 nm Semiconductor Defect Localization. ReBICTE [Internet]. 2025 Dec. 30 [cited 2026 Feb. 8];11:188-9. Available from: https://rebicte.org/index.php/rebicte/article/view/223